The operating principle is based on the detection of Coriolis force. The product is a two-chip solution mounted in an SOIC standard epoxy moulded package. To ensure high quality and mechanical support for the MEMS element, we have adopted wafer-level anodic bonding with specially developed and patented technologies to precisely control the pressure inside the sealed cavity.


The sensor interface ASIC has a closed-loop operation both in the drive mode and a force feedback loop for detection. The sensor is a capacitive device, and differential capacitances in the range of 10 exp -18 F can be successfully measured by the ASIC. This level of precision corresponds to a movement of the membrane by a few tens of Angstroms.


The following applications in the automotive market are targeted:


Rollover detection in airbag safety systems Dynamic Stability Control or ESP application Car navigation systems


The first of these products is for the rollover application. Samples of this product are ready and can be shipped at short notice. SensoNor has developed an evaluation kit to help our customers characterise the productin their chosen application. For further information, please contact our marketing department. The principle of operation and some characterization data are presented in this presentation.